Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever
Category
Conference lecture
Language
English
Author(s)
- Shimul Chandra Saha
- Ulrik Hanke
- Geir uri Jensen
- Trond Sæther
Affiliation
- SINTEF
- Norwegian University of Science and Technology
Presented at
IEEE International Behavioral Modeling and Simulation Confer
Place
San Jose, California, USA
Date
14.09.2006
Organizer
IEEE
Year
2006View this publication at Norwegian Research Information Repository