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MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry–Pérot Resonances

Abstract

Tunable metasurfaces promise to enable adaptive optical systems with complex functionalities. Among possible realizations, a recent platform combining microelectromechanical systems (MEMS) with gap-surface plasmon (GSP) metasurfaces offers high modulation efficiency, broadband operation, and fast response. We compare tunable metasurfaces operating in GSP and Fabry–Pérot (FP) regions by investigating polarization-independent blazed gratings both numerically and experimentally. Peak efficiency is calculated to be ∼75% in both cases (∼40% in measurements), while the operation bandwidth is found larger when operating in the GSP region. Advantages of operating in the FP region include relaxed assembly requirements and operation tolerances. Additionally, simulation and experimental results show that coupling between neighboring unit cells increases for larger air gaps, resulting in deteriorated efficiency. We believe the presented analysis provides important guidelines for designing tunable metasurfaces for diverse applications in miniaturized adaptive optical systems.
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Category

Academic article

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • University of Southern Denmark

Year

2022

Published in

Nano Letters

ISSN

1530-6984

Volume

22

Issue

17

Page(s)

6951 - 6957

View this publication at Norwegian Research Information Repository