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Thermal management of MEMS element with thermoelectric-cooler

Category

Academic chapter

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • Thalesgroup
  • CEA-Liten

Year

2021

Publisher

IEEE (Institute of Electrical and Electronics Engineers)

Book

Proceedings of 2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)

ISBN

9780956808677

View this publication at Norwegian Research Information Repository