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Surface energy of fusion bonded silicon nitride to silicon

Category

Conference lecture

Language

English

Author(s)

  • Kjersti Midtbø
  • Kari Schjølberg-Henriksen
  • Maaike Margrete Visser Taklo
  • Arne Rønnekleiv

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • Norwegian University of Science and Technology

Presented at

207th meeting of the electrochemical society

Place

Quebec

Date

15.05.2005 - 20.05.2005

Organizer

The electrochemical society

Year

2005

View this publication at Norwegian Research Information Repository