Selective Vacuum Evaporation by the Control of the Chemistry of Gas Phase in Vacuum Refining of Si

Client

• Sigma2 / NN9353K

Author(s)

• Arman Hoseinpur Kermani
• Stefan Andersson
• Kai Tang
• Jafar Safarian

Affiliation

• Norwegian University of Science and Technology
• SINTEF Industry / Metal Production and Processing

Issue

24

DOI

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