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Statistical analysis of structure loss in Czochralski silicon growth

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Category

Academic article

Client

  • Research Council of Norway (RCN) / 257639

Language

English

Author(s)

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF Industry / Metal Production and Processing

Year

2019

Published in

AIP Conference Proceedings

ISSN

0094-243X

Publisher

AIP Publishing (American Institute of Physics)

Volume

2147

Issue

1

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