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Monitoring selective etching of self-assembled nanostructured a-Si:Al films

Category

Academic article

Client

  • Research Council of Norway (RCN) / 245963
  • Research Council of Norway (RCN) / 197405
  • Research Council of Norway (RCN) / 231658
  • Research Council of Norway (RCN) / NORTEM 197405

Language

English

Author(s)

Affiliation

  • University of Oslo
  • SINTEF Industry / Sustainable Energy Technology

Year

2019

Published in

Nanotechnology

ISSN

0957-4484

Publisher

IOP Publishing

Volume

30

Issue

13

Page(s)

1 - 5

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