Monitoring selective etching of self-assembled nanostructured a-Si:Al films

Category

Academic article

Language

English

Author(s)

Torunn Kjeldstad
Annett Thøgersen
Marit Synnøve Sæverud Stange
Alexander Azarov
Eduard Monakhov
Augustinas Galeckas

Affiliation

SINTEF Industry / Sustainable Energy Technology
University of Oslo

Year

2019

Published in

Nanotechnology

ISSN

0957-4484

Volume

30

Issue

13

Page(s)

1 - 5

DOI

https://doi.org/10.1088/1361-6528/aafb86

View this publication at Norwegian Research Information Repository