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High-frequency 2D PZT based micromirrors

High-frequency 2D PZT based micromirrors

Category
Poster
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • Unknown
Presented at
PiezoMEMS
Place
Orlando
Date
16.01.2018 - 18.01.2018
Year