Abstract
A radio frequency sputtering method was utilized and developed for tungsten oxide film preparation. The thickness of tungsten oxide film can be controlled at nano scale. Tungsten oxide thin films with thickness of ~36 nm was prepared and investigated. The morphologies and microstructures of the as-prepared tungsten oxide thin films were characterized using X-ray diffraction, scanning electron microscopy, and Flourier transform infrared spectroscopy. Tungsten oxide films utilized in the laboratory changed color from colorless to blue during electrochemical cycles, showing a potential for assembling electrochromic smart windows to modulate the transmitted solar radiations.