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Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 241887/O70

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • Unknown

Presented at

2018 PiezoMEMS Workshop

Place

Orlando

Date

15.01.2018 - 16.01.2018

Organizer

Oregon State University and US Army Research Laboratory

Year

2018

External resources

View this publication at Cristin