Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters
Category
Conference lecture
Language
English
Author(s)
- Frode Tyholdt
- Paul Wittendorp
- Shruti Jain
- M Dekkers
- Wu Wen-Jong
- Matjaž Spreitzer
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
2018 PiezoMEMS Workshop
Place
Orlando
Date
15.01.2018 - 16.01.2018
Organizer
Oregon State University and US Army Research Laboratory
Year
2018View this publication at Norwegian Research Information Repository