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2D PZT based micromirrors with high resonance frequency or high angular deflection

Category

Conference poster

Language

English

Author(s)

  • Jo Gjessing
  • Thor Bakke
  • Skokic Zeljko

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems

Presented at

Norsk Elektrooptikkonferanse

Place

Henningsvær

Date

02.05.2018 - 04.05.2018

Year

2018

View this publication at Norwegian Research Information Repository