2D PZT based micromirrors with high resonance frequency or high angular deflection
Category
Conference poster
Language
English
Author(s)
- Jo Gjessing
- Thor Bakke
- Skokic Zeljko
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Norsk Elektrooptikkonferanse
Place
Henningsvær
Date
02.05.2018 - 04.05.2018
Year
2018View this publication at Norwegian Research Information Repository