To main content

Impact of thermal history on defects formation in the last solid fraction of Cz silicon ingots

Abstract

For the first time, the impact of the tail detachment on the quality of the last solid fraction of a Czochralski silicon ingot body is reported. Simulations of the thermal history were performed on CGSim software and showed that producing an ingot with a tail detached from the melt before the cone-end (the so called “popped-out” tail) changes the time that the last part of the ingot body remains at the 900-1200°C temperature range and could thus impact the growth of defects such as oxygen precipitates. In addition, ingots with tails completely grown were characterized and compared to ingots with popped-out tails. Lifetime measurements of the ingot last solid fraction were performed while voids and oxygen related defects were delineated with chemical etchants. These measurements were complemented with FTIR measurements performed at room and low temperature (30 K), before a two-step thermal oxidation took place. The results show no impact of the earlier detachment from the melt on the as-grown lifetime, as long as the generation and propagation of dislocations due to the detachment are constrained inside the tail. However, after the thermal oxidation, lower oxygen stacking fault density is found in the popped-out ingots, highlighting a possible improvement of the Czochralski quality with shorter tails.
Read the publication

Category

Academic article

Language

English

Author(s)

  • Adeline Anne Lanterne
  • Guilherme Manuel Morais Gaspar
  • Bjørn Haave
  • Moez Jomâa
  • Rune Søndenå
  • Alexander Hupfer
  • Yu Hu
  • Marisa Di Sabatino Lundberg

Affiliation

  • SINTEF Industry / Metal Production and Processing
  • Centre d'Etudes de Saclay
  • University of Aveiro
  • University of Oslo
  • Norwegian University of Science and Technology
  • NorSun AS
  • Institute for Energy Technology

Year

2018

Published in

AIP Conference Proceedings

ISSN

0094-243X

Volume

1999

Issue

1

Page(s)

1 - 8

View this publication at Norwegian Research Information Repository