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Simultaneous improvement of surface finish and bonding of centrifugal microfluidic devices in cyclo-olefin polymers

Abstract

Two key issues in the manufacturing of microfluidic devices are to obtain low surface roughness, i.e. in the range of nanometers (to facilitate optical detection and controlled flow through microfluidic networks), and to achieve robust bonding. Here we report that a chemical polishing step, used for smoothening the surface of cyclo-olefin polymer (COP) components manufactured by micromilling, reduces the surface roughness (to Ra ~ 150 nm) and facilitates a leak-tight COP-COP bond. We report new results on COP structuring and surface characterization by white light interferometry (WLI), infrared spectroscopy (FTIR-ATR), contact angle measurements and transmittance measurements, as well as demonstrations of a functional thermally bonded centrifugal microfluidic devices.

Category

Poster

Client

  • EC/H2020 / 688448
  • Research Council of Norway (RCN) / 245685

Language

English

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • Unknown
  • University of South-Eastern Norway
  • SINTEF Industry / Materials and Nanotechnology
  • SINTEF Industry / Sustainable Energy Technology
  • SINTEF Industry / Process Technology

Presented at

The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Place

Belfast

Date

21.01.2018 - 25.01.2018

Organizer

IEEE

Year

2018

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