Sodium contamination of SiO2 caused by anodic bonding
Category
Academic lecture
Language
English
Author(s)
- Kari Schjølberg-Henriksen
- Anders Bror Hanneborg
- Geir Uri Jensen
- Henrik Jakobsen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- University of Oslo
- Unknown
Presented at
SeSiBond wafer bonding workshop
Place
Barcelona, Spain
Date
30.09.2002