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Sodium contamination of SiO2 caused by anodic bonding

Category

Academic lecture

Language

English

Author(s)

  • Kari Schjølberg-Henriksen
  • Anders Bror Hanneborg
  • Geir Uri Jensen
  • Henrik Jakobsen

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • University of Oslo
  • Unknown

Presented at

SeSiBond wafer bonding workshop

Place

Barcelona, Spain

Date

30.09.2002

Year

2002

View this publication at Cristin