UV NANO IMPRINT LITOGRAPHY (UV-NIL) AT SINTEF MINALAB
Category
Academic lecture
Language
English
Author(s)
- Sanja Hadzialic
- Lars Geir Whist Tvedt
- Geir Uri Jensen
- Hallvard Angelskår
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Norsk elektrooptikkmøte
Date
13.04.2016 - 15.04.2016