Au-Au bonded interface microstructure and nanostructure formation during low temperature annealing
Category
Conference lecture
Language
English
Author(s)
- Brett Beekley
- Tingyu Bai
- N. Marathe
- Hannah Rosquist Tofteberg
- Nishant Malik
- Kari Schjølberg-Henriksen
- Mark Goorsky
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- University of Oslo
- University of California, Los Angeles (UCLA)
Presented at
WaferBond
Date
07.12.2015 - 09.12.2015
Year
2015View this publication at Norwegian Research Information Repository