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Au-Au bonded interface microstructure and nanostructure formation during low temperature annealing

Category

Conference lecture

Language

English

Author(s)

  • Brett Beekley
  • Tingyu Bai
  • N. Marathe
  • Hannah Rosquist Tofteberg
  • Nishant Malik
  • Kari Schjølberg-Henriksen
  • Mark Goorsky

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • University of Oslo
  • University of California, Los Angeles (UCLA)

Presented at

WaferBond

Date

07.12.2015 - 09.12.2015

Year

2015

View this publication at Norwegian Research Information Repository