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3D Detector Activities at SINTEF MiNaLab – Wafer Bonding, and Deep Reactive Ion Etching

3D Detector Activities at SINTEF MiNaLab – Wafer Bonding, and Deep Reactive Ion Etching

Category
Academic lecture
Language
English
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
International Wafers Level Packaging Conference
Place
San Jose
Date
13.10.2008 - 16.10.2008
Organizer
SMTA
Year
External resources