Abstract
Lecture at Vestfold University College
Plasma Etching, Part 1
Category
Conference lecture
Language
English
Author(s)
- Preben Storås
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Lecture at Vestfold University College
Place
Høyskolen i Vestfold
Date
03.03.2008 - 03.03.2008
Organizer
Høyskolen i Vestfold
Year
2008View this publication at Norwegian Research Information Repository