Abstract
SINTEF S130Gjesteforelesning på Høgskolen i Vestfold
Plasma Etching Part 1
Category
Conference lecture
Language
English
Author(s)
- Preben Storås
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Høgskolen i Vestfold
Place
Tønsberg
Date
31.03.2006
Year
2006View this publication at Norwegian Research Information Repository