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Optimisation of Low-Coherence Speckle Interferometry (LCSI) for characterisation of multi-layered materials

Abstract

In this paper the optical parameters of Low Coherence Speckle Interferometry (LCSI) are analysed in order to optimise the technique and increase the probing depth. The contrast of the interference signal depends on the configuration of the optical setup and the optical properties of the material. Theoretical investigations and measurements for optimising the beam ratio, the coherence function and imaging parameters are presented. By optimising the interference signal the probing depth of the technique can be extended. This is demonstrated for a semi-transparent polymer material. Finally, measurements of the deformation of interfaces in a multi-layered material are presented.

Category

Academic chapter/article/Conference paper

Language

English

Author(s)

  • Kay Gastinger
  • Svein Winther

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems

Year

2005

Publisher

SPIE - The International Society for Optics and Photonics

Book

Nano- and Micro-Metrology

Issue

5858

ISBN

9780819458582

Page(s)

157 - 168

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