Modelling of piezoelectric micromachined ultrasound transducers (pMUT) for medical use
PiezoMEMS transducers consist often of multilayered thin-film structures which are difficult to model with finite element modelling (FEM) tools due to high aspect ratio of the geometry. Therefore, a set of analytical models for different variables in the transfer function of the pMUT has been developed as a checking point for the multiphysics FEM simulations.
- Andreas Vogl
- Dag Thorstein Wang
- SINTEF Digital / Smart Sensors and Microsystems
2nd International Workshop on Piezoelectric MEMS
EPFL, Lausanne, Switzerland
06.09.2011 - 07.09.2011