To main content

3D Integration of MEMS and IC: Design, technology and simulations

Abstract

* 3D integration: Opportunities and trends* e-CUBES: Tire pressure monitoring system (TPMS)* Package design including thermo-mechanical modeling* Technology development* Sensor packaging concept* Gold stud bump bonding* Device characterization and testing* Summary and outlook
Read publication

Category

Academic lecture

Language

English

Author(s)

  • Kari Schjølberg-Henriksen

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems

Presented at

Advanced materials and technologies for micro/nano-devices, sensors and actuators

Place

St. Petersburg, Russia

Date

29.06.2009 - 02.07.2009

Year

2009

View this publication at Cristin