Abstract
Technologies based on the integration of Micro Electro Mechanical Systems (MEMS), including silicon based sensors with polymer microfluidic devices and functionalized surfaces, have emerged at breathtaking speed during the last 10 to 15 years. The transition from demonstrators for use in research labs to mass fabrication has, however, only partly met initial expectations. The presentation gives examples on promising MEMS application fields as flow rate sensors, in vivo sensors and biosensors for label free detection.