3D Silicon Sensors - Large Area Production, QA and Development for the CERN ATLAS Experiment Pixel Sensor Upgrade

Author(s)

• Angela Kok
• Maurizio Boscardin
• Gian-Franko Dalla Betta
• Cinzia Da Via
• Giovanni Darbo
• Celeste Fleta
• Philippe Grenier
• Sebastian Grinstein
• Thor-Erik Hansen
• Jasmine Hasi
• Crystal J. Kenney
• Sherwood I. Parker
• Guilio Pellegrini
• Elisa Vianello
• Nicola Zorzi

Affiliation

• SINTEF Digital / Smart Sensors and Microsystems
• National Institute of Nuclear Physics
• Fondazione Bruno Kessler
• Autonomous University of Barcelona
• Spanish National Research Council
• University of Manchester
• University of Hawaii System
• SLAC National Accelerator Laboratory

DOI