To main content

Heterogeneous integration of silicon fluidic components in polymer chips

Abstract

We present a new heterogeneous integration technology which enables direct incorporation of silicon-based microfluidic components in an injection-moulded polymer lab-on-a-chip (LOC). The integration is performed as part of the injection moulding process, forming direct fluidic connections between the polymer and the silicon chip while embedding the silicon chip in the polymer matrix. The resulting fluidic interface between the silicon and the polymer chip is therefore highly compact and free of dead-volume. The method requires no secondary integration process such as welding or gluing. The method opens for mass fabrication of highly functional, heterogeneous LOC systems.

Category

Academic chapter/article/Conference paper

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Industry / Materials and Nanotechnology

Year

2013

Publisher

Chemical and Biological Microsystems Society

Book

17th international conference on miniaturized systems for chemistry and life sciences, 2013, Freiburg, Germany, 27-31 Oct, 2013

Issue

2013

ISBN

978-0-9798064-6-9

Page(s)

796 - 798

View this publication at Cristin