Wafer level vacuum encapsulation for uncooled microbolometers
Category
Poster
Language
English
Author(s)
- Adriana Lapadatu
- Stian Martinsen
- Gjermund Kittilsland
- Astrid-Sofie Vardøy
- Thi Thuy Luu
- Nils Høivik
Affiliation
- University of Oslo
- SensoNor ASA
- SINTEF Digital / Smart Sensors and Microsystems
- University of South-Eastern Norway
Presented at
WaferBond'13
Place
Stockholm
Date
05.12.2013 - 06.12.2013
Organizer
Roy Knechtel, Frank Niklaus