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Wafer level vacuum encapsulation for uncooled microbolometers

Category

Poster

Language

English

Author(s)

  • Adriana Lapadatu
  • Stian Martinsen
  • Gjermund Kittilsland
  • Astrid-Sofie Vardøy
  • Thi Thuy Luu
  • Nils Høivik

Affiliation

  • University of Oslo
  • SensoNor ASA
  • SINTEF Digital / Smart Sensor Systems
  • University of South-Eastern Norway

Presented at

WaferBond'13

Place

Stockholm

Date

05.12.2013 - 06.12.2013

Organizer

Roy Knechtel, Frank Niklaus

Year

2013

View this publication at Cristin