Abstract
SINTEF MiNalab has a long track record in advanced development and flexible scale production in Microelectromechanical system (MEMS), micro and nano- fabrication and silicon radiation sensors. The technology has evolved through a series of challenging projects and development programmes since the early 1980s. The basic processes and long experiences enable an ultra-clean processing facility to provide sensors of superior quality. Low leakage current in combination with appropriate sensor design, fabricated radiation sensors can form a vital part of an ultra-low noise detector system. MiNaLab has successfully manufactured high quality pixel sensors, single- and double- sided strip sensors, avalanche photodiodes and silicon drift diodes. The application areas vary from material analysis to high energy physics.