FP7 piezoVolume – High volume production processes for piezoelectric microsystems
Category
Professional article
Language
English
Author(s)
- Frode Tyholdt
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Year
2013Published in
Commercial Micro Manufacturing
ISSN
1757-6105
Volume
6
Issue
2
Page(s)
32 - 34
External resources
View this publication at Norwegian Research Information Repository