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FP7 piezoVolume – High volume production processes for piezoelectric microsystems

Category

Professional article

Language

English

Author(s)

  • Frode Tyholdt

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems

Year

2013

Published in

Commercial Micro Manufacturing

ISSN

1757-6105

Volume

6

Issue

2

Page(s)

32 - 34

View this publication at Norwegian Research Information Repository