Abstract
Infrared emission spectroscopy with FTIR have been applied for non-contact measurements in a two-zone furnace. In the furnace, SiO is formed through combining Si and SiO2 at high temperature. The furnace was therefore modified with optical windows to allow for non-contact measurements. The experiments have been performed during 2023 and 2024. The continuous measurements of SiO emission spectra from the two-zone furnace have been successfully demonstrated. The analysis of SiO emission spectra was also aligned with temperature measurements and pressure parameters, so that the SiO formation process can be studied. Further work on robustification of the setup and routes to system calibration have been proposed.