Abstract
Micro-Electromechanical systems (MEMS) structures using piezoelectric thin films have often delicate mechanical structures (e.g. membranes) combined with a thin-film stack consisting of electrodes, the piezoelectric material and other materials such as stress compensation layers. Analytical models have been developed for the design of a membrane structure that is used as piezoelectric micromachined ultrasound transducers (PMUT). The validity of this models has been checked with measurements of the devices. An example of a sensing application is presented.