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PZT micromirror with integrated piezoresistive position sensors

Abstract

PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.

Category

Academic chapter

Language

English

Author(s)

  • Thor Bakke
  • Ib-Rune Johansen

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems

Year

2012

Publisher

IEEE (Institute of Electrical and Electronics Engineers)

Book

2012 International Conference on Optical MEMS and Nanophotonics (OMN), Banff, AB, 6-9 Aug. 2012

ISBN

9781457715112

Page(s)

192 - 193

View this publication at Norwegian Research Information Repository