Abstract
SERS sensors offer high sensitivity for real-time molecular detection but face limitations due to sample drying and reproducibility in exposure to samples. Integrating SERS with microfluidics addresses these issues. Here, we discuss microfluidic designs and material selection to enhance SERS sensitivity and minimize background interference. Using Finite Element Method (FEM) simulations and experimental optical characterization, we systematically optimized designs for uniform SERS sensors exposure to liquid samples. The manufacturability of microfluidics in glass and wafer-level anodic bonding for inte-gration were considered.