Abstract
This paper presents the development of miniaturized microplasma sources for gas analysis based on micro-electromechanical systems (MEMS) technology. We discuss critical device design aspects, from FEM modeling and device concept to fabrication and experimental validation. A functional demonstrator was fabricated, and successful plasma ignition was achieved under controlled conditions. The results suggest that the developed microplasma sources hold strong potential as compact, integrable compo-nents for gas analysis systems in various industrial applications.