Publications and responsibilities
Links between humidity-induced resistance-degradation and recovery of PZT-based piezoMEMS
Pb(Zr, Ti)O3 (PZT) is a piezoelectric material with large dielectric and piezoelectric compliances and is one of the most technologically important materials for thin film piezoelectric microelectromechanical systems. Reliability in humid conditions is a key concern for deploying devices in realisti...
Electrochemically driven degradation of PZT in humid ambient
Ambient humidity significantly accelerates degradation of PZT films in microelectromechanical systems; the cause of such degradation is under debate. Here it is shown that the primary driving force for PZT degrading in humid conditions is coupled to the electrochemical activity of the system towards...