Publications and responsibilities
Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters
Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications
Pb(Zr, Ti)O3 (PZT) and (PhMg1/3Nb2/3O3)2/3-CPbTiO3)1/3 (PMN-PT) thin films are epitaxially deposited on 200 mm wafers using Solmates' Pulsed Laser Deposition (PLD) platform. Epitaxy is achieved using an optimized TiN template layer on the lattice mismatched silicon. SrTiO3 was used as buffer layer a...