The MEMS-pie project:
Piezoelectric microsystems from the laboratory to production


  Sixth Framework Programme


Performance and main results
To be improved as new results are obtained


e31,f  =  -15 C/m2

er  =  1200 at 1 kHz

tand  = 0,01-0,03


These results were obtained for device elements with 2 ┬Ám thick PbZr0,53Ti0,47O3.


Published February 14, 2006

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