The MEMS-pie project:
Piezoelectric microsystems from the laboratory to production

                                              

  Sixth Framework Programme

 

Performance and main results
To be improved as new results are obtained

 

e31,f  =  -15 C/m2

er  =  1200 at 1 kHz

tand  = 0,01-0,03

 

These results were obtained for device elements with 2 ┬Ám thick PbZr0,53Ti0,47O3.

 

Published February 14, 2006

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