The MEMS-pie project:
Piezoelectric microsystems from the laboratory to production


  Sixth Framework Programme


Project details

Project full name:

Integration of piezoelectric thin films in micro-electromechanical systems

RTD Partners:

  • SINTEF, Norway (Coordinator)
  • EPFL, Switzerland
  • University of Twente, The Netherlands

SME Partners:

  • aixACCT Systems GmbH, Germany
  • Noliac A/S, Denmark
  • Precision Acoustics Ltd., UK
  • Sonitor Technologies AS, Norway
  • Hök Instrument AB, Sweden

MEMS-pie is supported by the 6th Framework Programme of the European Commission, Co-operative Research Activities (CRAFT), contract no. COOP-CT-2004-508219.

Published October 27, 2006

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