Sixth Framework Programme
Performance and uniformity across the waferThe transversal piezoelectric charge coefficient e31,f was measured at 10 V and frequencies between 0.1 and 10 Hz using the new method developed by the project:
Relative dielectric permittivity, er
Dielectric dissipation factor, tand
Fatigue testsA 5 kHz fatigue signal at +/- 25 V was applied to a typical cantilever. After 2•107 bipolar fatigue cycles, less than 10% reduction of the remanent polarisation was observed, as shown in the hysteresis loops below.
Published October 27, 2006
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