The MEMS-pie project:
Piezoelectric microsystems from the laboratory to production


  Sixth Framework Programme


Extended Summary
The MEMS-Pie project will develop reliable technology and qualified procedures for integration of piezoelectric thin films into micro-electromechanical systems (MEMS) on an industrial scale. The results will increase the competitiveness of European SMEs engaged in the MEMS market. Many small companies have innovative ideas for new types of sensors and actuators based on silicon technology with integrated piezoelectric functional elements. Examples of such devices are: ultrasonic imaging transducers, pressure and flow sensors, accelerometers, micromotors and micropumps. Reliable technology for integration of piezoelectric thin films is a key tool to realise these new products. However, current knowledge in the field is mostly limited to the conditions and scale of academic laboratories, and knowledge on reliability and reproducibility of the films and methods at industrial level is scarce. Therefore, this project will develop validated procedures and technology demonstrators for integration of piezoelectric thin films in MEMS. The thin films will be deposited using three different techniques: magnetron sputtering, sol-gel deposition and pulsed laser deposition. This approach will reduce the risk of the project considerably. Qualified production routes will form the basis for a new foundry service that one of the RTD partners plan to offer within 12 months after completion of the project. This service will be an open and low-cost alternative for production, particularly suitable for a large group of SMEs that do not have resources to build their own production line. The first commercial products produced by the new service are likely to be available in the market within two years after completion of the project. The project will also contribute to industrial standards in the field. The development of such standards is a particularly important tool for strengthening the competitiveness of SMEs. The project involves five non-competing SME partners with a diverse market and technology base, and three complementary RTD partners.

Published February 10, 2006

These web pages do not represent the opinion of the European Community and the Community is not responsible for any use that might be made of data appearing in them.