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FP7 piezoVolume – High volume production processes for piezoelectric microsystems

FP7 piezoVolume – High volume production processes for piezoelectric microsystems

Category
Journal publication
Client
  • EU / NMP2-SE-2009-229196 FP7 piezoVolume
Language
English
Author(s)
Affiliation
  • SINTEF Materials and Chemistry / Tynnfilm og membranteknologi
Year
2013
Published in
Commercial Micro Manufacturing
ISSN
1757-6105
Volume
6
Issue
2
Page(s)
32 - 34