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Mats Stefan Carlin

Research Director

Mats Stefan Carlin

Research Director

Mats Stefan Carlin
Phone: +47 934 07 944
Mobile: +47 934 07 944
Department: Smart Sensor Systems
Office: Oslo

publications and responsibilities

Publications

Publication

Cracks, inclusions and microscopy of Si at SINTEF ICT

http://www.sintef.no/en/publications/publication/?pubid=SINTEF+S17226

The activity on optical inspection of silicon wafers at SINTEF ICT has a focus on micro crack detection and NIR microscopy. The Scanning Near Infra-Red Microscopy (SNIRM) configuration and experimental setup, as well as measurement results on microcracks and inclusions were presented. Short introduc...

Year 2010
Type Presentation
Publication

Smart Inspection System for High Speed and Multifunctional Testing of MEMS and MOEMS

http://www.sintef.no/en/publications/publication/?pubid=SINTEF+S10211

SMARTIEHS develops a major breakthrough in M(O)EMS testing innovative test concept parallel inspection of 100 M(O)EMS structures on the wafer level high-speed inspection measurement time can be reduced by a factor of 100 multi-functional approach exchangeable probing wafer enable...

Year 2008
Type Presentation