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Mats Stefan Carlin

Research Director

Mats Stefan Carlin

Research Director

Mats Stefan Carlin
Phone: +47 934 07 944
Department: Smart Sensor Systems
Office: Oslo

Publications and responsibilities

Publications

Publication

Cracks, inclusions and microscopy of Si at SINTEF ICT

http://www.sintef.no/en/publications/publication/?pubid=CRIStin+1272512

The activity on optical inspection of silicon wafers at SINTEF ICT has a focus on micro crack detection and NIR microscopy. The Scanning Near Infra-Red Microscopy (SNIRM) configuration and experimental setup, as well as measurement results on microcracks and inclusions were presented. Short introduc...

Authors Carlin Mats Stefan Johnsen Lars Gastinger Kay
Year 2010
Type Conference lecture and academic presentation
Publication

Smart Inspection System for High Speed and Multifunctional Testing of MEMS and MOEMS

http://www.sintef.no/en/publications/publication/?pubid=CRIStin+1270961

SMARTIEHS develops a major breakthrough in M(O)EMS testing innovative test concept parallel inspection of 100 M(O)EMS structures on the wafer level high-speed inspection measurement time can be reduced by a factor of 100 multi-functional approach exchangeable probing wafer enable a wide range of tes...

Authors Carlin Mats Stefan Gastinger Kay Lombardo Sebastiano
Year 2008
Type Conference lecture and academic presentation
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