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Results from the first prototype of large 3D active edge sensors

Sammendrag

3D active edge sensors have advantages such as radiation hardness and edgeless capability. With the use of deep reactive ion etching and wafer bonding, 18.5 by 20.5 mm2 3D detectors with active edges have been successfully fabricated at SINTEF MiNaLab. These sensors are compatible with the ATLAS FE-I4 readout electronics. Fabrication process and difficulties are presented and the preliminary electrical measurements are also discussed.

Kategori

Vitenskapelig Kapittel/Artikkel/Konferanseartikkel

Språk

Engelsk

Forfatter(e)

Institusjon(er)

  • SINTEF Digital / Smart Sensors and Microsystems
  • Fondazione Bruno Kessler
  • Università degli Studi di Trento
  • University of Manchester
  • Istituto Nazionale di Fisica Nucleare
  • Centro Nacional de Microelectrónica
  • SLAC National Accelerator Laboratory
  • University of Hawaii at Hilo

År

2012

Forlag

IEEE conference proceedings

Bok

2011 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC): Valencia, 23-29 Oct, 2011

Hefte nr.

2011

ISBN

978-1-4673-0118-3

Side(r)

1319 - 1323

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