Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching

Forfatter(e)

• Christopher Andrew Dirdal
• Geir Uri Jensen
• Hallvard Angelskår
• Paul Conrad Vaagen Thrane
• Jo Gjessing
• Daniel Alfred Ordnung

Institusjon(er)

• SINTEF Digital / Smart Sensors and Microsystems
• Ukjent

Hefte nr.

10

DOI