Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters
Kategori
Vitenskapelig foredrag
Oppdragsgiver
- Research Council of Norway (RCN) / 241887/O70
Språk
Engelsk
Forfatter(e)
- Frode Tyholdt
- Paul Wittendorp
- Shruti Jain
- M Dekkers
- Wu Wen-Jong
- Matjaž Spreitzer
Institusjon(er)
- SINTEF Digital / Smart Sensors and Microsystems
- Ukjent
Presentert på
2018 PiezoMEMS Workshop
Sted
Orlando
Dato
15.01.2018 - 16.01.2018
Arrangør
Oregon State University and US Army Research Laboratory