Characterization and Failure Analysis of 3D Integrated Systems using a novel plasma-FIB system
Kategori
Vitenskapelig foredrag
Språk
Engelsk
Forfatter(e)
- Laurens Kwakman
- German Franz
- Maaike Margrete Visser Taklo
- Armin Klumpp
- Peter Ramm
Institusjon(er)
- Ukjent
- SINTEF Digital / Smart Sensors and Microsystems
Presentert på
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Sted
Grenoble
Dato
23.05.2011 - 26.05.2011