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Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches

Sammendrag

Microwave characterization of bulk, thin and thick film ferroelectrics is considered in this chapter. Both single crystals and ceramics are discussed. The resonant techniques include disk, Courtney and composite resonator methods for characterization of the bulk ferroelectrics. The open resonator and split post dielectric resonator methods are considered for thick films. Resonator techniques for on-wafer characterization of the thin films and varactors include: microprobe resonator, transmission line resonator, and the near field scanning microscope. The broadband techniques include transmission/reflection method and methods based on coplanar lines and coupled microstrip lines. The methods for the measurement of the nonlinearities and tuning speeds also are considered.

Kategori

Vitenskapelig artikkel

Språk

Engelsk

Forfatter(e)

  • Deokki Min
  • Nils Hoivik
  • Geir Uri Jensen
  • Frode Tyholdt
  • Camilla Haavik
  • Ulrik Hanke

Institusjon(er)

  • Universitetet i Sørøst-Norge
  • SINTEF Digital / Smart Sensors and Microsystems
  • SINTEF Industri / Bærekraftig energiteknologi

År

2011

Publisert i

Applied Physics A: Materials Science & Processing

ISSN

0947-8396

Forlag

Springer

Årgang

105

Hefte nr.

4

Side(r)

867 - 874

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