Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks
Les publikasjonen
Kategori
Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
Oppdragsgiver
- Research Council of Norway (RCN) / 247781
Språk
Engelsk
Forfatter(e)
- Elizaveta Vereshchagina
- Erik Poppe
- Kari Schjølberg-Henriksen
- Markus Wöhrmann
- Sigurd Moe
Institusjon(er)
- SINTEF Digital / Smart Sensors and Microsystems
- Fraunhofer-Institut für Werkstoffmechanik IWM
År
2018Forlag
IEEE (Institute of Electrical and Electronics Engineers)
Bok
2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018
ISBN
978-1-5386-6814-6