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Optimisation of Low-Coherence Speckle Interferometry (LCSI) for characterisation of multi-layered materials

Sammendrag

In this paper the optical parameters of Low Coherence Speckle Interferometry (LCSI) are analysed in order to optimise the technique and increase the probing depth. The contrast of the interference signal depends on the configuration of the optical setup and the optical properties of the material. Theoretical investigations and measurements for optimising the beam ratio, the coherence function and imaging parameters are presented. By optimising the interference signal the probing depth of the technique can be extended. This is demonstrated for a semi-transparent polymer material. Finally, measurements of the deformation of interfaces in a multi-layered material are presented.

Kategori

Vitenskapelig Kapittel/Artikkel/Konferanseartikkel

Språk

Engelsk

Forfatter(e)

  • Kay Gastinger
  • Svein Winther

Institusjon(er)

  • SINTEF Digital / Smart Sensors and Microsystems

År

2005

Forlag

SPIE - The International Society for Optics and Photonics

Bok

Nano- and Micro-Metrology

Hefte nr.

5858

ISBN

9780819458582

Side(r)

157 - 168

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